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Phone: (281) 591-0800 Fax: (281) 591-0052
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Semiconductor Gases
The semiconductor industry knows the importance of measuring moisture in UHP gases. High moisture levels have been linked to reduced yields and variable device characteristics in most semiconductor technologies, and for most geometries. So, while the exact purity requirements for a 3 micron MOS device and a 0.35 micron CMOS ASIC are different, the need for specification purity gas is the same.
AMETEK Process Instruments’ Model 5900 UHP moisture analyzer is specifically designed for semiconductor gas purity analysis. This leaflet describes many highlights. In addition, AMETEK has prepared a CD-ROM with comprehensive information about the 5900 UHP in semiconductor applications. Please contact AMETEK for your complimentary copy.
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